Nonlinear Modeling and Simulation of Thermal Effects in Microcantilever Resonators Dynamic

Thermal dependency of material characteristics in micro electromechanical systems strongly affects their performance, design, and control. Hence, it is essential to understand and model that in MEMS devices to optimize their designs. A thermal phenomenon introduces two main effects: damping due to internal friction, and softening due to Young modulustemperature relation. Based on some reported theoretical and experimental results, we model the thermal phenomena and use two Lorentzian functions to describe the restoring and damping forces caused by thermal phenomena. In order to emphasize the thermal effects, a nonlinear model of the MEMS, by considering capacitor nonlinearity, have been used. The response of the system is developed by employing multiple time scales perturbation method on nondimensionalized form of equations. Frequency response, resonant frequency and peak amplitude are examined for variation of dynamic parameters involved.